STAr Virgo Prima Series 3D/2.5D MEMS Probe Card for WAT Test

HSINCHU, March 18, 2025 /PRNewswire/ — STAr Technologies, a leading probe card manufacturer, has been engaged in probe card technology for 25 years and is at the cutting edge of probe card manufacturing. The launch of STAr Virgo Prima, which is one of probe card series for semiconductor parametric and reliability test, presents the achievement in 3D/2.5D MEMS probe card development for WAT test (Wafer Acceptance Test, WAT) and provides users the positive effects on test efficiency and reliable results.

STAr Virgo Prima is MEMS micro-cantilever probe card for WAT test

MEMS (Micro-Electro-Mechanical Systems, MEMS) probe card with the optimized structure and is an ideal to support fine-pitch and high-pin count test requirements. The Virgo Prima MEMS micro-cantilever probe cards taking the advantages of MEMS probe and experience-based techniques are designed specifically for nanometer technology, node processing and extend performance beyond existing WAT test probe cards.

Virgo Prima Probe Card features include：

Small probe mark with low-scrub depth
Low parasitic LC and low leakage current
Superior ground shield for complete noise isolation
High-temperature reliability tests up to 200degC (HCI, NBTI, TDDB, EM)

“WAT probe cards play a vital role in characterization qualification to the manufacturing of semiconductor.” Yu-Ming Chien, STAr Technologies’ Senior Vice President of Test and Measurement Business Unit commented, “STAr Virgo Prima Series ensure excellent test performance and exactly corresponding to the emerging test needs semiconductor industry and technologies of diverse applications.”

STAr Virgo Prima Series 3D/2.5D MEMS Probe Card for WAT Test

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